III–V/Silicon-on-Insulator Nanophotonic Cavities for Optical Network-on-Chip

Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates.

We demonstrate full integration of vertical optical ring resonators with silicon nanophotonic waveguides on silicon-on-insulator substrates to accomplish a significant step toward 3D photonic integration. The on-chip integration is realized by rolling up 2D differentially strained TiO(2) nanomembranes into 3D microtube cavities on a nanophotonic microchip. The integration configuration allows f...

All-nanophotonic NEMS biosensor on a chip

Integrated chemical and biological sensors give advantages in cost, size and weight reduction and open new prospects for parallel monitoring and analysis. Biosensors based on nanoelectromechanical systems (NEMS) are the most attractive candidates for the integrated platform. However, actuation and transduction techniques (e.g. electrostatic, magnetomotive, thermal or piezoelectric) limit their ...

Nanophotonic devices on thin buried oxide Silicon-On-Insulator substrates.

We demonstrate a silicon photonic platform using thin buried oxide silicon-on-insulator (SOI) substrates using localized substrate removal. We show high confinement silicon strip waveguides, micro-ring resonators and nanotapers using this technology. Propagation losses for the waveguides using the cutback method are 3.88 dB/cm for the quasi-TE mode and 5.06 dB/cm for the quasi-TM mode. Ring res...

Silicon nanophotonic devices for chip-scale optical communication applications [Invited].

This paper reviews recent work in the area of silicon photonic devices and circuits for monolithic and heterogeneous integration of circuits and systems on a chip. In this context, it presents fabrication results for producing low-loss silicon waveguides without etching. Resonators and add-drop distributed filters utilizing sidewall modulation fabricated in a single lithography and etching step...

Silicon-on-Insulator Wafers with Buried Cavities